000 00303nam a22001217a 4500
999 _c2576
_d2576
020 _a9780306474972
082 _a621.044
100 _aFrancis F Chen & Jane P Chang
245 _aLecture Notes on principles of plasma processing
260 _aUnited states
_bSpringer
_c2003
300 _a208
942 _cBK